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ACTIVATION ANALYSIS AND AUTORADIOGRAPHY OF IMPURITY DISTRIBUTIONS IN SILICON MULTILAYER STRUCTURES.

Author
RAUSCH H
RES. INST. TELECOMMUNIC., BUDAPEST, HUNG.
Source
J. RADIOANAL. CHEM.; SWITZ.; DA. 1976; VOL. 33; NO 2; PP. 201-207; BIBL. 6 REF.
Document type
Article
Language
English
Keyword (fr)
COUCHE MINCE SILICIUM SILICIUM NITRURE SILICIUM OXYDE ANALYSE CHIMIQUE ANALYSE ACTIVATION AUTORADIOGRAPHIE ANALYSE QUANTITATIVE ELEMENT TRACE SODIUM CUIVRE OR ISOLANT NEUTRON CHIMIE ANALYTIQUE
Keyword (en)
THIN FILM SILICON SILICON NITRIDE SILICA CHEMICAL ANALYSIS CHEMICAL COMPOSITION ACTIVATION ANALYSIS AUTORADIOGRAPHY QUANTITATIVE ANALYSIS TRACE ELEMENT SODIUM COPPER GOLD INSULATION MATERIALS NEUTRONS ANALYTICAL CHEMISTRY
Keyword (es)
QUIMICA ANALYTICA
Classification
Pascal
001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry

Discipline
General chemistry and physical chemistry
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7760067208

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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