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CARACTERISATION DE FILMS ULTRA-MINCES D'OXYDE DE SILICIUM PAR SPECTROSCOPIE DE PHOTOELECTRONS ESCA.

Author
HOLLINGER G; JUGNET Y; PERTOSH P; PORTE L; TRAN MINH DUC
INST. PHYS. NUCL., UNIV. CLAUDE-BERNARD, LYON 1, F69621 VILLEURBANNE, FR.
Source
ANALUSIS; FR.; DA. 1977; VOL. 5; NO 1; PP. 2-10; ABS. ANGL.; BIBL. 35 REF.
Document type
Article
Language
French
Keyword (fr)
SILICIUM OXYDE COUCHE MINCE ANALYSE QUANTITATIVE SPECTROMETRIE PHOTOELECTRONIQUE DEPLACEMENT CHIMIQUE ANALYSE CHIMIQUE SILICIUM MONOCRISTAL INTERFACE SOLIDE SOLIDE REACTION SURFACE ANALYSE SURFACE CONTROLE PROCESSUS OXYDATION REACTION THERMIQUE CHIMIE ANALYTIQUE
Keyword (en)
SILICA THIN FILM QUANTITATIVE ANALYSIS CHEMICAL SHIFT CHEMICAL ANALYSIS CHEMICAL COMPOSITION SILICON SINGLE CRYSTAL SOLID SOLID INTERFACE SURFACE REACTION SURFACE ANALYSIS OXIDATION THERMAL REACTION ANALYTICAL CHEMISTRY
Keyword (es)
QUIMICA ANALYTICA
Classification
Pascal
001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry

Discipline
General chemistry and physical chemistry
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7760228560

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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