A DEVICE FOR PRECISE ALIGNMENT OF ELECTRON BEAM AND SAMPLE IN THE SCANNING ELECTRON MICROSCOPE.
- Author
- GIBSON ED; VERHOEVEN JD
DEP. MATER. SCI. ENG., IOWA STATE UNIV., AMES, IOWA 50010, USA - Source
- J. PHYS. E; G.B.; DA. 1977; VOL. 10; NO 10; PP. 1076-1077
- Document type
- Article
- Language
- English
- Keyword (fr)
- MICROSCOPIE ELECTRONIQUE MICROSCOPE BALAYAGE ALIGNEMENT FAISCEAU ELECTRON ECHANTILLON APPAREILLAGE METROLOGIE PHYSIQUE THEORIQUE
- Keyword (en)
- ELECTRON MICROSCOPY SCANNING MICROSCOPE ALIGNMENT SAMPLES MEASUREMENT SCIENCE THEORETICAL PHYSICS
- Keyword (es)
- METROLOGIA FISICA TEORICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7830127250
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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