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A DEVICE FOR PRECISE ALIGNMENT OF ELECTRON BEAM AND SAMPLE IN THE SCANNING ELECTRON MICROSCOPE.

Author
GIBSON ED; VERHOEVEN JD
DEP. MATER. SCI. ENG., IOWA STATE UNIV., AMES, IOWA 50010, USA
Source
J. PHYS. E; G.B.; DA. 1977; VOL. 10; NO 10; PP. 1076-1077
Document type
Article
Language
English
Keyword (fr)
MICROSCOPIE ELECTRONIQUE MICROSCOPE BALAYAGE ALIGNEMENT FAISCEAU ELECTRON ECHANTILLON APPAREILLAGE METROLOGIE PHYSIQUE THEORIQUE
Keyword (en)
ELECTRON MICROSCOPY SCANNING MICROSCOPE ALIGNMENT SAMPLES MEASUREMENT SCIENCE THEORETICAL PHYSICS
Keyword (es)
METROLOGIA FISICA TEORICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Discipline
Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7830127250

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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