AUTOMATIC REGISTRATION IN AN ELECTRON-BEAM LITHOGRAPHIC SYSTEM.
- Author
- DAVIS DE; MOORE RD; WILLIAMS MC; WOODARD OC
IBM SYST. PROD. DIV. LAB., EAST FISHKILL, N.Y. 12533 - Source
- I.B.M. J. RES. DEVELOP.; U.S.A.; DA. 1977; VOL. 21; NO 6; PP. 498-505; BIBL. 8 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- LITHOGRAPHIE FAISCEAU ELECTRON FABRICATION MICROELECTRONIQUE LECTURE AUTOMATISATION MASQUAGE MASQUAGE ELECTRONIQUE ELECTRONIQUE
- Keyword (en)
- ELECTRON BEAM LITHOGRAPHY MICROELECTRONIC FABRICATION READING AUTOMATION MASKING ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7830266515
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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