CARACTERISATION PHYSICOCHIMIQUE ET ELECTRIQUE DE COUCHES MINCES DE SILICIUM POLYCRISTALLIN OXYGENE. APPLICATIONS AUX DISPOSITIFS SEMICONDUCTEURS.
- Author
- BACUVIER P
SSC, 37100 TOURS 02 - Source
- DGRST-7670656; FR.; DA. 1978; PP. 1-97; BIBL. 2 P.; (RAPP. FINAL, ACTION CONCERTEE: COMPOSANTS CIRCUITS MICROMINIATURISES)
- Document type
- Report
- Language
- French
- Keyword (fr)
- COUCHE MINCE MATERIAU SILICIUM POLYCRISTAL DEPOT CHIMIQUE JONCTION PASSIVATION HAUTE TENSION TECHNOLOGIE MESA FABRICATION APPLICATION CROISSANCE CRISTALLINE CINETIQUE ETUDE EXPERIMENTALE METALLOIDE ELECTRONIQUE CRISTALLOGRAPHIE
- Keyword (en)
- THIN FILM MATERIALS SILICON POLYCRYSTAL CHEMICAL DEPOSITION JUNCTION PASSIVATION HIGH VOLTAGE MESA TECHNOLOGY APPLICATION CRYSTAL GROWTH KINETICS EXPERIMENTAL STUDY ELECTRONICS CRISTALLOGRAPHY
- Keyword (es)
- ELECTRONICA CRISTALOGRAFIA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography
- Discipline
- Electronics Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7830389168
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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Europe PubMed Central access
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