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PRACTICAL TROUBLESHOOTING OF VACUUM DEPOSITION PROCESSES AND EQUIPMENT FOR ALUMINIUM METALIZATION

Author
HOFFMAN V
VARIAN ASSOCIATES, PALO ALTO CA, USA
Source
SOLID STATE TECHNOL.; USA; DA. 1978; VOL. 21; NO 12; PP. 47-56; BIBL. 11 REF.
Document type
Article
Language
English
Keyword (fr)
DEPOT SOUS VIDE METALLISATION ALUMINIUM PULVERISATION CATHODIQUE METHODE PHASE VAPEUR APPAREILLAGE VIDE COUCHE MINCE PREPARATION FABRICATION MICROELECTRONIQUE ALUMINIUM ALLIAGE CRISTALLISATION PERFECTION CRISTALLINE ETUDE EXPERIMENTALE EVAPORATION BOMBARDEMENT ELECTRONIQUE ALUMINIUM ALLIAGE SILICIUM ALLIAGE ELECTRONIQUE CRISTALLOGRAPHIE
Keyword (en)
VACUUM DEPOSITION METALLIZING ALUMINUM CATHODIC SPUTTERING GROWTH FROM VAPOR VACUUM EQUIPMENT THIN FILM PREPARATION MICROELECTRONIC FABRICATION ALUMINIUM ALLOY CRYSTALLIZATION CRYSTAL PERFECTION EXPERIMENTAL STUDY ELECTRON BOMBARDMENT EVAPORATION ALLOYS ELECTRONICS CRISTALLOGRAPHY
Keyword (es)
ELECTRONICA CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7930344776

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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