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ION BEAM TECHNOLOGY APPLIED TO ELECTRON MICROSCOPY

Author
FRANKS J
ION TECH LTD., TEDDINGTON MIDDX, GBR
Source
ADV. ELECTRON. ELECTRON PHYS.; USA; DA. 1978; VOL. 47; PP. 1-50; BIBL. 3 P.
Document type
Article
Language
English
Keyword (fr)
MICROSCOPIE ELECTRONIQUE PREPARATION ECHANTILLON FAISCEAU ION GRAVURE FAISCEAU IONIQUE PULVERISATION FAISCEAU ION APPLICATION APPAREILLAGE METAL SEMICONDUCTEUR COMPOSE MINERAL ELECTRONIQUE
Keyword (en)
ELECTRON MICROSCOPY SAMPLE PREPARATION ION BEAM ETCHING APPLICATION METAL SEMICONDUCTOR MATERIALS INORGANIC COMPOUND ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7930402950

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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