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LONG-RANGE ENHANCEMENT OF BORON DIFFUSIVITY INDUCED BY A HIGH-SURFACE-CONCENTRATION PHOSPHORUS DIFFUSION

Author
LECROSNIER D; GAUNEAU M; PAUGAM J; PELOUS G; RICHOU F
CENT. NATIONAL ETUDES TELECOMMUN., LANNION 22301, FRA
Source
APPL. PHYS. LETTERS; USA; DA. 1979; VOL. 34; NO 3; PP. 224-226; BIBL. 15 REF.
Document type
Article
Language
English
Keyword (fr)
HETERODIFFUSION IMPLANTATION IMPURETE COUCHE MINCE HAUTE TEMPERATURE TRES HAUTE TEMPERATURE SILICIUM DIFFUSION BORE IMPURETE PHOSPHORE PHYSIQUE SOLIDE
Keyword (en)
IMPURITY DIFFUSION THIN FILM HIGH TEMPERATURE VERY HIGH TEMPERATURE SILICON SOLID PHYSICS
Keyword (es)
FISICA DEL ESTADO CONDENSADO
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7930426563

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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