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ROUGHNESS EVALUATION FOR THIN FILMS

Author
CESCATO L; FREJLICH J
UNIV. ESTADUAL CAMPINAS INST. FIS., CAMPINAS 13100 S.P., BRA
Source
APPL. OPT.; USA; DA. 1979; VOL. 18; NO 10; PP. 1486-1487; BIBL. 4 REF.
Document type
Article
Language
English
Keyword (fr)
RUGOSITE COUCHE MINCE EPAISSEUR INTERFEROMETRIE OPTIQUE DIMENSION APPLICATION PHYSIQUE THEORIQUE METROLOGIE
Keyword (en)
ROUGHNESS THIN FILM THICKNESS OPTICAL INTERFEROMETRY DIMENSIONS APPLICATION THEORETICAL PHYSICS MEASUREMENT SCIENCE
Keyword (es)
FISICA TEORICA METROLOGIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Discipline
Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7930451547

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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