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A SYSTEM FOR DEPOSITION OF FERROELECTRIC SUBSTANCES BY RADIO-FREQUENCY SPUTTERING

Author
SUROWIAK Z; ZAJOSZ H; DYTRY R
UNIV. SILESIA INST. PHYS., 40007 KATOWICE, POL
Source
THIN SOLID FILMS; NLD; DA. 1978; VOL. 51; NO 3; PP. 359-362; BIBL. 3 REF.
Document type
Article
Language
English
Keyword (fr)
FERROELECTRIQUE COUCHE MINCE CRISTALLISATION PULVERISATION HAUTE FREQUENCE APPAREILLAGE VIDE ETUDE EXPERIMENTALE COMPOSE MINERAL CRISTALLOGRAPHIE
Keyword (en)
FERROELECTRIC MATERIALS THIN FILM CRYSTALLIZATION RADIOFREQUENCY SPUTTERING VACUUM EXPERIMENTAL STUDY INORGANIC COMPOUND CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7940161410

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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