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THERMAL DIFFUSIVITY, SPECIFIC HEAT AND THERMAL CONDUCTIVITY OF CHEMICALLY VAPOR-DEPOSITED SI3N4

Author
HIRAI T; HAYASHI S; NIIHARA K
TOHOKU UNIV., SENDAI, JPN
Source
AMER. CERAM. SOC. BULL.; USA; DA. 1978; VOL. 57; NO 12; PP. 1126-1130; BIBL. 40 REF.
Document type
Article
Language
English
Keyword (fr)
SILICIUM NITRURE REFRACTAIRE DEPOT PHASE VAPEUR PROPRIETE THERMIQUE CONDUCTIVITE THERMIQUE DIFFUSIVITE THERMIQUE CHALEUR MASSIQUE STRUCTURE ETAT AMORPHE STRUCTURE CRISTALLINE FABRICATION METHODE ETUDE LASER INFLUENCE INDUSTRIE CHIMIQUE
Keyword (en)
SILICON NITRIDE REFRACTORY MATERIALS VAPOUR DEPOSITION THERMAL PROPERTIES THERMAL CONDUCTIVITY THERMAL DIFFUSIVITY SPECIFIC HEAT AMORPHOUS STATE STRUCTURE CRYSTAL STRUCTURE INVESTIGATION METHOD LASER INFLUENCE CHEMICAL INDUSTRY
Keyword (es)
INDUSTRIA QUIMICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D07 Chemical engineering

Discipline
Chemical engineering
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7960221512

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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