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DETERMINATION OF THE PHOSPHORUS CONTENT OF DOPED SIO2 FILMS BY IR ABSORPTION AND ACTIVATION ANALYSIS

Author
HOFFMANN G; PUSKAS L; LORINC M; NAGY A
HUNGARIAN ACAD. SCI. RES. INST. TECH. PHYS., BUDAPEST, HUN
Source
J. PHYS. D; GBR; DA. 1979; VOL. 12; NO 4; PP. 569-577; BIBL. 15 REF.
Document type
Article
Language
English
Keyword (fr)
DOSAGE ANALYSE ACTIVATION SPECTROMETRIE ABSORPTION SPECTROMETRIE IR COUCHE MINCE DOPAGE SEMICONDUCTEUR METHODE PHYSIQUE PHOSPHORE!ACT SILICE!SUB CHIMIE ANALYTIQUE
Keyword (en)
ANALYTICAL DETERMINATION ACTIVATION ANALYSIS ABSORPTION SPECTROMETRY ABSORPTION SPECTROSCOPY INFRARED SPECTROMETRY INFRARED SPECTROSCOPY THIN FILM DOPING SEMICONDUCTOR MATERIALS PHYSICAL METHOD ANALYTICAL CHEMISTRY
Keyword (es)
QUIMICA ANALYTICA
Classification
Pascal
001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry

Discipline
General chemistry and physical chemistry
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7960411053

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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