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PREFERED SPUTTERING ON BINARY ALLOY SURFACES OF THE AL-PD-SI SYSTEM

Author
HO PS; LEWIS JE; CHU WK
IBM T.J. WATSON RESEARCH CENTER, YORKTOWN HEIGHTS NY 10598, USA
Source
SURF. SCI.; NLD; DA. 1979; VOL. 85; NO 1; PP. 19-28; BIBL. 16 REF.
Document type
Article
Language
English
Keyword (fr)
EMISSION ELECTRONIQUE AUGER PULVERISATION CATHODIQUE SURFACE ALLIAGE METAL TRANSITION ALLIAGE ALUMINIUM ALLIAGE SILICIUM ALLIAGE PALLADIUM ALLIAGE BINAIRE COUCHE MINCE ALLIAGE ALUMINIUM PALLADIUM ALLIAGE PALLADIUM SILICIUM ALLIAGE ALUMINIUM SILICIUM PHYSIQUE SOLIDE
Keyword (en)
AUGER EMISSION CATHODIC SPUTTERING SURFACE BINARY ALLOY THIN FILM SOLID PHYSICS
Keyword (es)
FISICA DEL ESTADO CONDENSADO
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8030038376

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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