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PRACTICAL CLEANING PROCEDURES FOR VACUUM DEPOSITION EQUIPEMENT

Author
NICHOLS DR
VARIAN,PALO ALTO CA,USA
Source
SOLID STATE TECHNOL.; USA; DA. 1979; VOL. 22; NO 12; PP. 73-81; BIBL. 8 REF.
Document type
Article
Language
English
Keyword (fr)
DEPOT DEPOT SOUS VIDE METHODE PHASE VAPEUR NETTOYAGE APPAREILLAGE VIDE VIDE ELECTRONIQUE METROLOGIE PHYSIQUE THEORIQUE
Keyword (en)
VACUUM DEPOSITION GROWTH FROM VAPOR CLEANING VACUUM EQUIPMENT VACUUM ELECTRONICS MEASUREMENT SCIENCE THEORETICAL PHYSICS
Keyword (es)
ELECTRONICA METROLOGIA FISICA TEORICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8030289586

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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