LITHOGRAFIETECHNIKEN FUER HOECHST-INTEGRIERTE SCHALTUNGEN
- Other title
- TECHNIQUES LITHOGRAPHIQUES POUR CIRCUITS FORTEMENT INTEGRES (fr)
- Author
- SCHAUMBURG H
PHILIPS GMBH,HAMBURG 2000,DEU - Source
- MESSEN U. PRUEFEN; DEU; DA. 1979; NO 10; PP. 767-771; (3 P.)
- Document type
- Article
- Language
- German
- Keyword (fr)
- CIRCUIT INTEGRE CIRCUIT LSI LITHOGRAPHIE FABRICATION MICROELECTRONIQUE LITHOGRAPHIE FAISCEAU ELECTRON LITHOGRAPHIE RX PHOTOLITHOGRAPHIE ELECTRONIQUE
- Keyword (en)
- INTEGRATED CIRCUIT LSI CIRCUIT LITHOGRAPHY MICROELECTRONIC FABRICATION ELECTRON BEAM LITHOGRAPHY X RAY LITHOGRAPHY PHOTOLITHOGRAPHY ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL8030300516
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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