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EDDY CURRENT COMPENSATION IN TOROIDAL DEFFECTION YOKES

Author
PFEIFFER HC; STURANS MA
I.B.M., DATA SYSTEMS DIVISION/HOPEWELL JUNCTION NY 12533/USA
Source
J. APPL. PHYS.; ISSN 0021-8979; USA; DA. 1980; VOL. 51; NO 7; PP. 3516-3519; BIBL. 6 REF.
Document type
Article
Language
English
Keyword (fr)
FAISCEAU ELECTRONIQUE DEFLEXION BOBINE DEFLEXION COMPENSATION COURANT TOURBILLON LITHOGRAPHIE FAISCEAU ELECTRON ELECTRONIQUE
Keyword (en)
ELECTRON BEAM DEFLECTION DEFLECTION COIL VORTEX ELECTRON BEAM LITHOGRAPHY ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8130036401

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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