ROOM TEMPERATURE CARBON AND OXYGEN DETERMINATION IN SINGLE-CRYSTAL SILICON
- Author
- VIDRINE DW
NICOLET INSTRUMENT CORP./MADISON WI 53711/USA - Source
- ANAL. CHEM. (WASH.); ISSN 0003-2700; USA; DA. 1980; VOL. 52; NO 1; PP. 92-96; BIBL. 6 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- DOSAGE SEMICONDUCTEUR ELEMENT TRACE IMPURETE SPECTROMETRIE IR TRANSFORMEE FOURIER MONOCRISTAL AUTOMATISATION LONGUEUR ONDE LASER SILICIUM!SUB CARBONE!ANA OXYGENE!ANA CHIMIE ANALYTIQUE
- Keyword (en)
- ANALYTICAL DETERMINATION SEMICONDUCTOR MATERIALS TRACE ELEMENT IMPURITIES INFRARED SPECTROMETRY INFRARED SPECTROSCOPY SINGLE CRYSTAL AUTOMATION WAVELENGTH LASER ANALYTICAL CHEMISTRY
- Keyword (es)
- QUIMICA ANALYTICA
- Classification
- Discipline
- Analytical chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL8130110162
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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