BELEUCHTUNGSOPTIK IN FOTOLITHOGRAPHISCHEN BELICHTUNGSEINHEITEN
- Other title
- SYSTEME OPTIQUE D'ECLAIRAGE DANS LES DISPOSITIFS D'EXPOSITION EN PHOTOLITHOGRAPHIE (fr)
- Author
- LEIPOLD H; SYMANOWSKI C
VEB CARL ZEISS/JENA/DDR - Source
- FEINGERAETETECHNIK; ISSN 0014-9683; DDR; DA. 1980; VOL. 29; NO 12; PP. 561-564; ABS. ENG/FRE; BIBL. 6 REF.
- Document type
- Article
- Language
- German
- Keyword (fr)
- PHOTOLITHOGRAPHIE ECLAIRAGE CONDENSEUR METROLOGIE PHYSIQUE THEORIQUE
- Keyword (en)
- PHOTOLITHOGRAPHY LIGHTING CONDENSER MEASUREMENT SCIENCE THEORETICAL PHYSICS
- Keyword (es)
- METROLOGIA FISICA TEORICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL8130184280
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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Istex access
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