PLASMA CHEMISTRY OF FLUOROCARBONS AS RELATED TO PLASMA ETCHING AND PLASMA POLYMERIZATION
- Author
- KAY E; COBURN J; DILKS A
IBM RES. LAB./SAN JOSE CA 95193/USA - Source
- TOP. CURR. CHEM.; ISSN 0340-1022; DEU; DA. 1980; NO 94; PP. 1-42; BIBL. 125 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- POLYMERISATION DECHARGE ELECTRIQUE PLASMA MECANISME REACTION POLYMERE FLUOR ETHYLENE(TETRAFLUORO) POLYMERE SYNTHESE BIBLIOGRAPHIQUE SILICIUM GERMANIUM MOLYBDENE TUNGSTENE CATHODE POLYMERE ORGANOMETALLIQUE PREPARATION FLUOR COMPOSE ORGANIQUE ETHYLENE(TETRAFLUORO) POLYMERES CHIMIE MACROMOLECULAIRE
- Keyword (en)
- GLOW DISCHARGE POLYMERIZATION PLASMA REACTION MECHANISM FLUORINE CONTAINING POLYMER TETRAFLUOROETHYLENE POLYMER BIBLIOGRAPHIC REVIEW SILICON GERMANIUM MOLYBDENUM TUNGSTEN CATHODE ORGANOMETALLIC POLYMER PREPARATION ETHYLENE(TETRAFLUORO) POLYMERS MACROMOLECULAR CHEMISTRY
- Keyword (es)
- POLIMEROS QUIMICA MACROMOLECULAR
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL8130203006
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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