LIMITATIONS ON SINGLE BEAM PRODUCTION LITHOGRAPHY
- Author
- LEVI MW
ROME AIR DEVELOPMENT CENT./GRIFFISS AFB NY 13441/USA - Source
- I.E.E.E. ELECTRON DEVICE LETT.; USA; DA. 1980; VOL. 1; NO 10; PP. 194-196; BIBL. 3 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- LITHOGRAPHIE FABRICATION MICROELECTRONIQUE CIRCUIT INTEGRE CIRCUIT VLSI LIMITE ELECTRONIQUE
- Keyword (en)
- LITHOGRAPHY MICROELECTRONIC FABRICATION INTEGRATED CIRCUIT VLSI CIRCUIT LIMIT ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL8130251566
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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