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EDGE ACUITY IMPROVEMENT BY SPECTRAL FILTRATION IN THE DEEP U.V.

Author
MCCULLOUGH AW
PERKIN-ELMER CORP./NORWALK CT 06856/USA
Source
J. ELECTROCHEM. SOC.; ISSN 0013-4651; USA; DA. 1981; VOL. 128; NO 1; PP. 225-226; BIBL. 2 REF.
Document type
Article
Language
English
Keyword (fr)
PHOTOLITHOGRAPHIE RAYONNEMENT UV BORD NETTETE IMAGE FILTRE UV LIMITE RESOLUTION FONCTION TRANSFERT OPTIQUE METROLOGIE PHYSIQUE THEORIQUE
Keyword (en)
PHOTOLITHOGRAPHY ULTRAVIOLET RADIATION EDGE IMAGE SHARPNESS ULTRAVIOLET FILTER RESOLVING POWER OPTICAL TRANSFER FUNCTION MEASUREMENT SCIENCE THEORETICAL PHYSICS
Keyword (es)
METROLOGIA FISICA TEORICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Discipline
Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8130344114

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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