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THERMAL BEHAVIOR OF LASER-ANNEALED GAAS STUDIED BY HELIUM BACKSCATTERING SPECTROSCOPY

Author
AMANO J; PIANETTA PA; STOLTE CA
HEWLETT-PACKARD LAB./PALO ALTO CA 94304/USA
Source
APPL. PHYS. LETT.; ISSN 0003-6951; USA; DA. 1980; VOL. 37; NO 10; PP. 948-949; BIBL. 11 REF.
Document type
Article
Language
English
Keyword (fr)
COMPOSE MINERAL METAL GROUPE IIIB COMPOSE RECUIT FAISCEAU LASER TRAITEMENT THERMIQUE ANALYSE DIFFUSION ION PORTEUR CHARGE CONCENTRATION PORTEUR CHARGE IMPLANTATION ION GALLIUM ARSENIURE RETRODIFFUSION HELIUM ION ATOMIQUE TELLURE ION ATOMIQUE IMPURETE TELLURE CRISTALLOGRAPHIE PHYSIQUE SOLIDE
Keyword (en)
INORGANIC COMPOUND ANNEALING LASER BEAM HEAT TREATMENT CHARGE CARRIER CHARGE CARRIER CONCENTRATION ION IMPLANTATION CRISTALLOGRAPHY SOLID PHYSICS
Keyword (es)
CRISTALOGRAFIA FISICA DEL ESTADO CONDENSADO
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8130496983

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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