AN INORGANIC RESIST FOR ION BEAM MICROFABRICATION
- Author
- BALASUBRAMANYAM K; KARAPIPERIS L; LEE CA; RUOFF AL
CORNELL UNIV./ITHACA NY 14853/USA - Source
- J. VAC. SCI. TECHNOL.; ISSN 0022-5355; USA; DA. 1981; VOL. 19; NO 1; PP. 19-22; BIBL. 21 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- FABRICATION MICROELECTRONIQUE LITHOGRAPHIE FAISCEAU IONIQUE RESIST COMPOSE MINERAL ETAT AMORPHE CHALCOGENURE ELECTRONIQUE
- Keyword (en)
- MICROELECTRONIC FABRICATION ION BEAM LITHOGRAPHY RESIST INORGANIC COMPOUND AMORPHOUS STATE CHALCOGENIDES ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL8130510413
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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