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A NEW CVD TECHNIQUE FOR THE PREPARATION OF TRANSPARENT CONDUCTING FILMS

Author
TABATA O; TANAKA T; WASEDA M; KINUHARA K
Source
OSAKA KOGYO GIJUTSU SHIKENSHO KIHO; ISSN 0472-142X; JPN; DA. 1980; VOL. 31; NO 3; PP. 183-188; BIBL. 6 REF.
Document type
Article
Language
English
Keyword (fr)
DEPOT CHIMIQUE PHASE VAPEUR COMPOSE MINERAL ELEMENT GROUPE IVB COMPOSE METAL GROUPE IIIB COMPOSE ETUDE EXPERIMENTALE CROISSANCE CRISTALLINE COUCHE MINCE ETAIN IV OXYDE INDIUM OXYDE CRISTALLOGRAPHIE
Keyword (en)
CHEMICAL VAPOR DEPOSITION INORGANIC COMPOUND EXPERIMENTAL STUDY CRYSTAL GROWTH THIN FILM INDIUM OXIDE CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8130514659

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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