DEUTERIUM AT THE SI-SIO2 INTERFACE DETECTED BY SECONDARY-ION MASS SPECTROMETRY
- Author
- JOHNSON NM; BIEGELSEN DK; MOYER MD; DELINE VR; EVANS CA JR
XEROX PALO ALTO RESEARCH CENTERS/PALO ALTO CA 94304/USA - Source
- APPL. PHYS. LETT.; ISSN 0003-6951; USA; DA. 1981; VOL. 38; NO 12; PP. 995-997; BIBL. 9 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- NON METAL COMPOSE MINERAL OXYDATION TRAITEMENT THERMIQUE DISTRIBUTION IMPURETE SPECTROMETRIE SIMS IMPURETE INTERFACE SOLIDE SOLIDE COUCHE MINCE SILICIUM OXYDE SUPPORT SI IMPURETE DEUTERIUM CRISTALLOGRAPHIE
- Keyword (en)
- NON METAL INORGANIC COMPOUND OXIDATION HEAT TREATMENT IMPURITY DISTRIBUTION SECONDARY ION MASS SPECTROMETRY IMPURITY SOLID SOLID INTERFACE THIN FILM SILICON OXIDES SILICON CRISTALLOGRAPHY
- Keyword (es)
- CRISTALOGRAFIA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL82X0019512
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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