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DETERMINING SELF-CONSISTENT THERMODYNAMIC PARAMETERS OF CVD SYSTEMS

Author
VORONIN VA; PROCHOROV VA; CHYCHMAREV SK
LVOV POLITECH./LVOV 290646/SUN
Source
INTERNATIONAL CONFERENCE ON CHEMICAL VAPOR DEPOSITION. 8/1981/GOUVIEUX; USA; PENNINGTON NJ: THE ELECTROCHEMICAL SOCIETY; DA. 1981; PP. 66-71; BIBL. 6 REF.
Document type
Conference Paper
Language
English
Keyword (fr)
DEPOT CHIMIQUE PHASE VAPEUR ANALYSE THERMODYNAMIQUE ETUDE THEORIQUE COUCHE MINCE CROISSANCE CRISTALLINE CRISTALLOGRAPHIE
Keyword (en)
CHEMICAL VAPOR DEPOSITION THERMODYNAMIC ANALYSIS THEORETICAL STUDY THIN FILM CRYSTAL GROWTH CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL82X0061008

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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