FORMATION OF WXSI1-X BY PLASMA CHEMICAL VAPOR DEPOSITION
- Otro titulo
- FORMATION DE WXSI1-X PAR DEPOT CHIMIQUE EN PHASE VAPEUR PAR PLASMA (fr)
- Autor
- AKITMOTO K; WATANABE R
SONY CORP./HODOGAYA-KU YOKOHAMA 240/JPN - Fuente
- APPL. PHYS. LETT.; ISSN 0003-6951; USA; DA. 1981; VOL. 39; NO 5; PP. 445-447; BIBL. 8 REF.
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave (fr)
- ALLIAGE BINAIRE METAL TRANSITION ALLIAGE DEPOT CHIMIQUE PHASE VAPEUR DECHARGE LUMINESCENTE COMPOSITION CHIMIQUE ETAT AMORPHE ETAT CRISTALLIN MICROSONDE ELECTRONIQUE MICROSONDE IONIQUE DIFFRACTION RX ETUDE EXPERIMENTALE RESISTIVITE ELECTRIQUE COUCHE MINCE CRISTALLISATION SILICIUM TUNGSTENE ALLIAGE TUNGSTENE SILICIURE ALLIAGE AMORPHE CONDUCTIVITE ELECTRIQUE EFFET COMPOSITION DEPOT PHASE VAPEUR RECUIT PREPARATION ALLIAGE2 W:>50 SI:0-10 CRISTALLOGRAPHIE METALLURGIE
- Palabra clave (in)
- BINARY ALLOY TRANSITION METAL ALLOYS CHEMICAL VAPOR DEPOSITION GLOW DISCHARGE CHEMICAL COMPOSITION AMORPHOUS STATE CRYSTALLINE STATE ELECTRON MICROPROBE ION MICROPROBE X RAY DIFFRACTION EXPERIMENTAL STUDY ELECTRIC RESISTIVITY THIN FILM CRYSTALLIZATION SILICON TUNGSTEN ALLOYS TUNGSTEN SILICIDES X RAY DIFFRACTION AMORPHOUS ALLOY ELECTRICAL CONDUCTIVITY COMPOSITION EFFECT VAPOUR DEPOSITION ELECTROLESS PLATING ANNEALING PREPARATION CRISTALLOGRAPHY METALLURGY
- Palabra clave (es)
- CRISTALOGRAFIA METALURGIA
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography
- Disciplina
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- PASCAL82X0076475
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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Acceso mediante Istex
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Acceso mediante Europe PubMed Central
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Acceso mediante arXiv
