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DRY ETCHING OF NB AND FABRICATION OF NB VARIABLE-THICKNESS-BRIDGES

Author
HARADA T; GAMO K; NAMBA S
OSAKA UNIV., FAC. ENG. SCI., DEP. ELECTR. ENG./OSAKA 560/JPN
Source
JPN. J. APPL. PHYS.; ISSN 0021-4922; JPN; DA. 1981; VOL. 20; NO 1; PP. 259-264; BIBL. 14 REF.
Document type
Article
Language
English
Keyword (fr)
SUPRACONDUCTIVITE PONT SUPRACONDUCTEUR NIOBIUM COUCHE MINCE FABRICATION EFFET JOSEPHSON GRAVURE JONCTION JOSEPHSON COURANT CONTINU ELECTRONIQUE
Keyword (en)
SUPERCONDUCTIVITY NIOBIUM THIN FILM MANUFACTURING DIRECT CURRENT ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL82X0118492

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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