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CARACTERISATION PAR METHODES CAPACITIVES DE COUCHES DE SILICIUM IMPLANTEES PUIS GUERIES PAR RECUIT THERMIQUE OU LASER

Other title
CHARACTERIZATION BY CAPACITIVE METHODS OF SILICON LAYERS IMPLANTED AND SUBSEQUENTLY CURED BY HEAT ANNEALING OR LASER (en)
Author
BLOSSE A
Source
FRA; DA. 1981; 74 P.-PL.; 30 CM; BIBL. DISSEM.; TH. DOCT.-ING./LILLE 1/1981/286
Document type
Thesis
Language
French
Keyword (fr)
NON METAL DEFAUT PONCTUEL DEFAUT IRRADIATION IRRADIATION LASER RECUIT TRAITEMENT THERMIQUE METHODE ELECTRIQUE ETUDE EXPERIMENTALE FAISCEAU LASER COUCHE MINCE IMPLANTATION ION SILICIUM ARSENIC ION ATOMIQUE CRISTALLOGRAPHIE PHYSIQUE SOLIDE
Keyword (en)
NON METAL POINT DEFECT IRRADIATION DEFECT ANNEALING HEAT TREATMENT ELECTRICAL METHOD EXPERIMENTAL STUDY IRRADIATION LASER BEAM THIN FILM ION IMPLANTATION SILICON CRISTALLOGRAPHY SOLID PHYSICS
Keyword (es)
CRISTALOGRAFIA FISICA DEL ESTADO CONDENSADO
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL82X0172538

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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