AN ELLIPSOMETRIC STUDY OF OXIDE GROWTH ON NB, AL AND NB3AL FILMS BY RF PLASMA
- Other title
- ETUDE PAR ELLIPSOMETRIE DE LA CROISSANCE D'OXYDE SUR LES FILMS DE NB, AL ET NB3AL (fr)
- Author
- KATOH Y; TANABE K; MICHIKAMI O
NIPPON TELEGRAPH AND TELEPHONE PUBLIC CORP./TOKAI IBARAKI 319-11/JPN - Source
- JPN. J. APPL. PHYS.; ISSN 0021-4922; JPN; DA. 1982; VOL. 21; NO 2; PART. 1; PP. L100-L102; BIBL. 14 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- ETUDE EXPERIMENTALE METAL METAL TRANSITION OXYDATION PULVERISATION HAUTE FREQUENCE ELLIPSOMETRIE INDICE REFRACTION ALLIAGE BINAIRE METAL TRANSITION ALLIAGE CROISSANCE CRISTALLINE COUCHE MINCE OXYDE NIOBIUM ALUMINIUM ALUMINIUM NIOBIUM ALLIAGE METAL PUR NB METAL PUR AL CRISTALLOGRAPHIE METALLURGIE
- Keyword (en)
- EXPERIMENTAL STUDY METAL TRANSITION METAL OXIDATION RADIOFREQUENCY SPUTTERING ELLIPSOMETRY REFRACTION INDEX BINARY ALLOY TRANSITION METAL ALLOYS CRYSTAL GROWTH THIN FILM OXIDES NIOBIUM ALUMINIUM ALUMINIUM NIOBIUM ALLOYS CRISTALLOGRAPHY METALLURGY
- Keyword (es)
- CRISTALOGRAFIA METALURGIA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography
- Discipline
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL82X0311519
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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