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A NEW ELLIPSOMETRIC METHOD FOR MEASUREMENTS ON SURFACES AND SURFACE LAYERS

Author
STENBERG M; SANDSTROEM T; STIBLERT L
CHALMERS TEKNISKA HOEGSKOLA. RESEARCH LAB. OF ELECTRONICS/GOETEBORG/SWE
Source
MATER. SCI. ENG.; CHE; DA. 1980; VOL. 42; NO 1/2; PP. 65-69; BIBL. 3 REF.
Document type
Conference Paper
Language
English
Keyword (fr)
ELLIPSOMETRIE REFLEXION LUMIERE POLARISEE APPAREIL MESURE MESURE EPAISSEUR COUCHE MINCE DOSAGE METALLURGIE
Keyword (en)
ELLIPSOMETRY REFLECTION POLARIZED LIGHT MEASURING INSTRUMENT THICKNESS MEASUREMENT THIN FILM ANALYTICAL DETERMINATION METALLURGY
Keyword (es)
METALURGIA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy

Discipline
Metals. Metallurgy
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8300199676

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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