NUMERICAL ANALYSIS OF ELECTRON BEAM LITHOGRAPHY SYSTEMS. I: COMPUTATION OF FIELDS IN MAGNETIC DEFLECTORS
- Author
- MUNRO E; CHU HC
IMPERIAL COLL./LONDON SW7 2BZ/GBR - Source
- OPTIK (STUTTG.); ISSN 0030-4026; DEU; DA. 1982; VOL. 60; NO 4; PP. 371-390; ABS. GER; BIBL. 4 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- LITHOGRAPHIE FAISCEAU ELECTRON DEFLECTEUR CHAMP MAGNETIQUE METHODE CALCUL OPTIQUE ELECTRONIQUE METHODE ELEMENT FINI CHAMP TOROIDAL LOI BIOT SAVART ELECTRONIQUE
- Keyword (en)
- ELECTRON BEAM LITHOGRAPHY DEFLECTOR MAGNETIC FIELD CALCULATING METHOD ELECTRON OPTICS FINITE ELEMENT METHOD TOROIDAL FIELD ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL83X0008414
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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