A NOVEL MICRO METAL-IMAGING SYSTEM BASED ON SELECTIVE ZINC VAPOR DEPOSITION
- Author
- OHNO S; MARUYAMA K
JAPAN BROADCASTING CORP./TOKYO 157/JPN - Source
- PHOTOGR. SCI. ENG.; ISSN 0031-8760; USA; DA. 1982; VOL. 26; NO 6; PP. 300-304; BIBL. 10 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- METAL FORMATION IMAGE IMAGERIE ZINC RAYONNEMENT UV IRRADIATION MATERIAU NON ARGENTIQUE COUCHE MINCE DEPOT METHODE PHASE VAPEUR DEPOT CHIMIQUE PHASE VAPEUR METROLOGIE PHYSIQUE THEORIQUE ELECTRONIQUE
- Keyword (en)
- METAL IMAGE FORMATION IMAGERY ZINC ULTRAVIOLET RADIATION IRRADIATION NON SILVER MATERIAL THIN FILM DEPOSITION GROWTH FROM VAPOR CHEMICAL VAPOR DEPOSITION MEASUREMENT SCIENCE THEORETICAL PHYSICS ELECTRONICS
- Keyword (es)
- METROLOGIA FISICA TEORICA ELECTRONICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL83X0080348
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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