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A NOVEL MICRO METAL-IMAGING SYSTEM BASED ON SELECTIVE ZINC VAPOR DEPOSITION

Author
OHNO S; MARUYAMA K
JAPAN BROADCASTING CORP./TOKYO 157/JPN
Source
PHOTOGR. SCI. ENG.; ISSN 0031-8760; USA; DA. 1982; VOL. 26; NO 6; PP. 300-304; BIBL. 10 REF.
Document type
Article
Language
English
Keyword (fr)
METAL FORMATION IMAGE IMAGERIE ZINC RAYONNEMENT UV IRRADIATION MATERIAU NON ARGENTIQUE COUCHE MINCE DEPOT METHODE PHASE VAPEUR DEPOT CHIMIQUE PHASE VAPEUR METROLOGIE PHYSIQUE THEORIQUE ELECTRONIQUE
Keyword (en)
METAL IMAGE FORMATION IMAGERY ZINC ULTRAVIOLET RADIATION IRRADIATION NON SILVER MATERIAL THIN FILM DEPOSITION GROWTH FROM VAPOR CHEMICAL VAPOR DEPOSITION MEASUREMENT SCIENCE THEORETICAL PHYSICS ELECTRONICS
Keyword (es)
METROLOGIA FISICA TEORICA ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0080348

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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