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FORMATION OF METASTABLE SUPERSATURATED SOLID SOLUTIONS IN ION IMPLANTED SILICON DURING SOLID PHASE CRYSTALLIZATION

Author
NARAYAN J; HOLLAND OW
OAK RIDGE NATIONAL LAB./OAK RIDGE TN 37830/USA
Source
APPL. PHYS. LETT.; ISSN 0003-6951; USA; DA. 1982; VOL. 41; NO 3; PP. 239-242; BIBL. 10 REF.
Document type
Article
Language
English
Keyword (fr)
ETUDE EXPERIMENTALE NON METAL RETRODIFFUSION RUTHERFORD CANALISATION PARTICULE MICROSCOPIE ELECTRONIQUE TRANSMISSION METHODE ETAT SOLIDE MOYENNE ENERGIE SOLUTION SOLIDE SOLUBILITE PHASE METASTABLE DEFAUT ETENDU CINETIQUE IMPLANTATION ION IMPURETE CRISTALLISATION SILICIUM IMPURETE ANTIMOINE IMPURETE INDIUM IMPURETE BISMUTH IMPURETE GALLIUM IMPURETE ARSENIC CRISTALLOGRAPHIE
Keyword (en)
EXPERIMENTAL STUDY NON METAL RUTHERFORD BACKSCATTERING CHANNELING TRANSMISSION ELECTRON MICROSCOPY GROWTH FROM SOLID STATE INTERMEDIATE ENERGY SOLID SOLUTION SOLUBILITY METASTABLE PHASE EXTENDED DEFECT KINETICS ION IMPLANTATION IMPURITY CRYSTALLIZATION SILICON CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0083371

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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