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A NOVEL METHOD FOR MEASUREMENT OF THE CHANNEL LENGTH OF SHORT CHANNEL MOSFET'S

Author
OKUMURA K; MIYOSHI M
TOSHIBA CORP./KAWASAKI/JPN
Source
J. ELECTROCHEM. SOC.; ISSN 0013-4651; USA; DA. 1982; VOL. 129; NO 6; PP. 1338-1342; BIBL. 5 REF.
Document type
Article
Language
English
Keyword (fr)
TRANSISTOR EFFET CHAMP TRANSISTOR MOS CANAL TRANSISTOR METHODE MESURE LONGUEUR COURANT INDUIT FAISCEAU ELECTRONIQUE METHODE ELECTRIQUE JONCTION P N ELECTRONIQUE
Keyword (en)
FIELD EFFECT TRANSISTOR MOS TRANSISTOR TRANSISTOR CHANNEL MEASUREMENT METHOD LENGTH INDUCED CURRENT ELECTRON BEAM ELECTRICAL METHOD P N JUNCTION ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0103924

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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