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EFFECT OF A MAGNETIC FILTER ON THE FORMATION AND DEPOSITION OF HIGH-Z IMPURITIES IN A MULTICUSP ION SOURCE

Author
EHLERS KW; LEUNG KN; PINCOSY PA; VELLA MC
UNIV. CALIFORNIA, LAWRENCE BERKELEY LAB./BERKELEY CA 94720/USA
Source
APPL. PHYS. LETT.; ISSN 0003-6951; USA; DA. 1982; VOL. 41; NO 6; PP. 517-519; BIBL. 15 REF.
Document type
Article
Language
English
Keyword (fr)
SOURCE ION IMPURETE SOURCE ION PLASMA CONFIGURATION N CUSPIDES FILTRE MAGNETIQUE ELECTRONIQUE
Keyword (en)
ION SOURCE IMPURITY PLASMA ION SOURCE ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0160855

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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