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A NEW HOLOGRAM INTERFEROMETRY MICROSCOPE FOR INTEGRATED CIRCUITS

Author
CUCUREZEANU I; CHISLEAG R; SUCIU P; CICEI A
POLYTECH. INST./BUCHAREST/ROM
Source
REVUE ROUMAINE DE PHYSIQUE; ISSN 0035-4090; ROM; DA. 1982; VOL. 27; NO 6-7; PP. 677-680; BIBL. 2 REF.
Document type
Article
Language
English
Keyword (fr)
APPLICATION CIRCUIT INTEGRE INTERFEROMETRIE OPTIQUE INTERFEROMETRE INTERFEROMETRIE HOLOGRAPHIQUE MICROSCOPE MICROSCOPIE OPTIQUE METROLOGIE PHYSIQUE THEORIQUE
Keyword (en)
APPLICATION INTEGRATED CIRCUIT OPTICAL INTERFEROMETRY INTERFEROMETER HOLOGRAPHIC INTERFEROMETRY MICROSCOPE OPTICAL MICROSCOPY MEASUREMENT SCIENCE THEORETICAL PHYSICS
Keyword (es)
METROLOGIA FISICA TEORICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics

Discipline
Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0195062

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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