CARACTERISATION ELECTRIQUE DE COUCHES ENFOUIES DE SIC OBTENUES PAR L'IMPLANTATION D'IONS CARBONE DANS LE SILICIUM MONOCRISTALLIN
- Author
- MOUHOUB A; ROGER JA; DURUPT P; PIVOT J
UNIV. CLAUDE BERNARD, DEP. PHYS. MATERIAUX/LYON/FRA - Source
- THIN SOLID FILMS; ISSN 0040-6090; CHE; DA. 1982; VOL. 88; NO 2; PP. 101-112; ABS. ENG; BIBL. 10 REF.
- Document type
- Article
- Language
- French
- Keyword (fr)
- CONDUCTIVITE ELECTRIQUE IMPLANTATION ION SILICIUM CARBURE ION CARBONE PHYSIQUE SOLIDE
- Keyword (en)
- ELECTRICAL CONDUCTIVITY ION IMPLANTATION SOLID PHYSICS
- Keyword (es)
- FISICA DEL ESTADO CONDENSADO
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL83X0267782
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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