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CONTAMINATION-FREE HIGH TEMPERATURE TREATMENT OF SILICON OR OTHER MATERIALS

Author
SCHMIDT PF
BELL LAB./ALLENTOWN PA 18103/USA
Source
JOURNAL OF THE ELECTROCHEMICAL SOCIETY; ISSN 0013-4651; USA; DA. 1983; VOL. 130; NO 1; PP. 196-199; BIBL. 12 REF.
Document type
Article
Language
English
Keyword (fr)
NON METAL CONTAMINATION TRAITEMENT THERMIQUE OXYDATION ATMOSPHERE CONTROLEE ETUDE EXPERIMENTALE IMPURETE SILICIUM CRISTALLOGRAPHIE
Keyword (en)
NON METAL CONTAMINATION HEAT TREATMENT OXIDATION CONTROLLED ATMOSPHERE EXPERIMENTAL STUDY IMPURITY SILICON CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0288578

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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