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DEFECT CHARACTERISTICS AND GENERATION MECHANISM IN A BIRD BEAK FREE STRUCTURE BY SIDERWALL MASKED TECHNIQUE

Author
FANG RCY; CHIU KY; MOLL JL
HEWLETT-PACKARD CO./PALO ALTO CA 94304/USA
Source
JOURNAL OF THE ELECTROCHEMICAL SOCIETY; ISSN 0013-4651; USA; DA. 1983; VOL. 130; NO 1; PP. 190-196; BIBL. 15 REF.
Document type
Article
Language
English
Keyword (fr)
ETUDE EXPERIMENTALE NON METAL FIGURE ATTAQUE TOPOGRAPHIE RX DECORATION MICROSCOPIE ELECTRONIQUE TRANSMISSION SUPPORT CONTRAINTE OXYDATION DIODE FABRICATION DISLOCATION SILICIUM SILICIUM NITRURE CRISTALLOGRAPHIE ELECTRONIQUE
Keyword (en)
EXPERIMENTAL STUDY NON METAL ETCH PIT X RAY TOPOGRAPHY DECORATION TRANSMISSION ELECTRON MICROSCOPY SUPPORT CONSTRAINT OXIDATION DIODE MANUFACTURING DISLOCATION SILICON SILICON NITRIDES CRISTALLOGRAPHY ELECTRONICS
Keyword (es)
CRISTALOGRAFIA ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0338351

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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