DEFECT CHARACTERISTICS AND GENERATION MECHANISM IN A BIRD BEAK FREE STRUCTURE BY SIDERWALL MASKED TECHNIQUE
- Author
- FANG RCY; CHIU KY; MOLL JL
HEWLETT-PACKARD CO./PALO ALTO CA 94304/USA - Source
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY; ISSN 0013-4651; USA; DA. 1983; VOL. 130; NO 1; PP. 190-196; BIBL. 15 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- ETUDE EXPERIMENTALE NON METAL FIGURE ATTAQUE TOPOGRAPHIE RX DECORATION MICROSCOPIE ELECTRONIQUE TRANSMISSION SUPPORT CONTRAINTE OXYDATION DIODE FABRICATION DISLOCATION SILICIUM SILICIUM NITRURE CRISTALLOGRAPHIE ELECTRONIQUE
- Keyword (en)
- EXPERIMENTAL STUDY NON METAL ETCH PIT X RAY TOPOGRAPHY DECORATION TRANSMISSION ELECTRON MICROSCOPY SUPPORT CONSTRAINT OXIDATION DIODE MANUFACTURING DISLOCATION SILICON SILICON NITRIDES CRISTALLOGRAPHY ELECTRONICS
- Keyword (es)
- CRISTALOGRAFIA ELECTRONICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography
- Discipline
- Electronics Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL83X0338351
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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