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CALCUL EXACT DE LA FONCTION DE DISTRIBUTION DES IONS INCIDENTS SUR UNE CIBLE DANS LE CAS D'UN PLASMA DE PULVERISATION

Other title
EXACT ENERGY DISTRIBUTION COMPUTATION OF PARTICLES STRIKING THE TARGET IN SPUTTERING (en)
Author
CHOUAN Y; COLLOBERT D
CENT. NATIONAL ETUDES TELECOMMUN./LANNION 22301/FRA
Source
JOURNAL DE PHYSIQUE; ISSN 0302-0738; FRA; DA. 1982; VOL. 43; NO 2; PP. 279-283; ABS. ENG; BIBL. 12 REF.
Document type
Article
Language
French
Keyword (fr)
DECHARGE ELECTRIQUE PULVERISATION INTERACTION SOLIDE PLASMA GAINE IONIQUE DISTRIBUTION ENERGIE CALCUL NUMERIQUE IRRADIATION ION ARGON ION METAL TRANSITION TANTALE METAL PUR TA PULVERISATION SOUS IRRADIATION PHYSIQUE DES PLASMAS PHYSIQUE SOLIDE METALLURGIE
Keyword (en)
ELECTRIC DISCHARGE SPRAYING SURFACE PLASMA INTERACTION ION SHEATH ENERGY DISTRIBUTION NUMERICAL CALCULATION IRRADIATION IONS ARGON IONS TRANSITION METAL ARGON ION PLASMA PHYSICS SOLID PHYSICS METALLURGY
Keyword (es)
FISICA DE LAS PLASMAS FISICA DEL ESTADO CONDENSADO METALURGIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B30 Atomic and molecular physics

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy

Discipline
Atomic and molecular physics Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0338433

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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