LIFT-OFF PROCESS FOR ACHIEVING FINE-LINE METALLIZATION
- Author
- MILGRAM AA
FAIRCHILD ADVANCED RES. DEVELOPMENT LAB./PALO ALTO CA 94304/USA - Source
- JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. B: MICROELECTRONICS PROCESSING AND PHENOMENA; ISSN 512982; USA; DA. 1983; VOL. 1; NO 2; PP. 490-493; BIBL. 26 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- FABRICATION MICROELECTRONIQUE METALLISATION ALUMINIUM CUIVRE SILICIUM ALLIAGE METHODE DECOLLAGE DECOLLAGE ELECTRONIQUE
- Keyword (en)
- MICROELECTRONIC FABRICATION METALLIZING ALUMINIUM COPPER SILICON ALLOYS ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL83X0410972
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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