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FORMATION OF SIC PARTICLES FROM SI(CH3)CL3 BY A PLASMA GAS PHASE REACTION

Author
KATO A; OZEKI T; HOJO J
KYUSHU UNIV., FAC. ENG./FUKUOKA-SHI 812/JPN
Source
JOURNAL OF THE LESS-COMMON METALS; ISSN 0022-5088; CHE; DA. 1983; VOL. 92; NO 2; PP. L5-L7; BIBL. 3 REF.
Document type
Article
Language
English
Keyword (fr)
PREPARATION PHASE GAZEUSE PLASMA SILANE ORGANIQUE SILICIUM CARBURE!FIN SILANE(METHYL TRICHLORO)!ENT CHIMIE MINERALE
Keyword (en)
PREPARATION GAS PHASE PLASMA ORGANIC SILANE SILICON CARBIDES!FIN INORGANIC CHEMISTRY
Keyword (es)
QUIMICA INORGANICA
Classification
Pascal
001 Exact sciences and technology / 001C Chemistry / 001C03 Organic chemistry

Discipline
Organic chemistry
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0423147

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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