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A REVISED ANALYSIS OF DRY OXIDATION OF SILICON

Author
FARGEIX A; GHIBAUDO G; KAMARINOS G
ENSERG/GRENOBLE 38031/FRA
Source
JOURNAL OF APPLIED PHYSICS; ISSN 0021-8979; USA; DA. 1983; VOL. 54; NO 5; PP. 2878-2880; BIBL. 12 REF.
Document type
Article
Language
English
Keyword (fr)
SILICIUM OXYDATION COUCHE MINCE SILICIUM IV OXYDE CROISSANCE CRISTALLINE CRISTALLOGRAPHIE
Keyword (en)
SILICON OXIDATION THIN FILM SILICON IV OXIDES CRYSTAL GROWTH CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0440852

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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