INTERNATIONAL CONFERENCE ON MICROLITHOGRAPHY; MICROCIRCUIT ENGINEERING 82/COLLOQUE INTERNATIONAL SUR LA MICROLITHOGRAPHIE, GRENOBLE, 5-8 OCTOBRE 1982
- Author
- SOCIETE DES ELECTRICIENS, DES ELECTRONICIENS ET DES RADIOELECTRICIENS/PARIS/FRA; GROUPEMENT DES INDUSTRIES ELECTRONIQUES/FRA
- Source
- MICROCIRCUIT ENGINEERING 82. COLLOQUE INTERNATIONAL SUR LA MICROLITHOGRAPHIE/1982-10-05/GRENOBLE; FRA; GRENOBLE: COMITE DU COLLOQUE INTERNATIONAL SUR LA MICROLITHOGRAPHIE; DA. 1982; 395 P.; 30 CM
- Document type
- Conference Proceedings
- Language
- English; French
- Keyword (fr)
- FABRICATION MICROELECTRONIQUE LITHOGRAPHIE PHOTOLITHOGRAPHIE LITHOGRAPHIE RX LITHOGRAPHIE FAISCEAU ELECTRON MICROSTRUCTURE CONGRES LITHOGRAPHIE OPTIQUE GRENOBLE 82 ELECTRONIQUE
- Keyword (en)
- MICROELECTRONIC FABRICATION LITHOGRAPHY PHOTOLITHOGRAPHY X RAY LITHOGRAPHY ELECTRON BEAM LITHOGRAPHY MICROSTRUCTURE CONGRESS ELECTRONICS
- Keyword (es)
- ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL83X0477521
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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Panist access
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Istex access
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Europe PubMed Central access
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