Smart sensors, actuators, and MEMS II (9-11 May 2005, Seville, Spain)Chiao, Jung-Chih; Cané, Carles.SPIE proceedings series. 2005, isbn 0-8194-5831-7, 1Vol, XV-730 p, isbn 0-8194-5831-7Conference Proceedings

Smart sensors, actuators, and MEMS IV (4-6 May 2009, Dresden, Germany)Schmid, Ulrich; Cané, Carles; Shea, Herbert R et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 1 vol, isbn 978-0-8194-7636-4Conference Proceedings

Thermoelectric Thin Film Power Generators - Self-sustaining power supply for smart systemsNUMUS, Joachim.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736205.1-736205.6Conference Paper

Smart sensors, actuators, and MEMS (Maspalomas, 19-21 May 2003)Jung-Chih Chiao; Varadan, Vijay K; Cané, Carles et al.SPIE proceedings series. 2003, isbn 0-8194-4976-8, XXVI, 434 p, isbn 0-8194-4976-8Conference Proceedings

Manufacturing, Assembling and Packaging of Miniaturized Implants for Neural Prostheses and Brain-Machine InterfacesSTLEGLITZ, Thomas.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620C.1-73620C.10Conference Paper

Single Crystalline Silicon Based Surface Micromachining for High Precision Inertial Sensors: Technology and Design for ReliabilityKNECHTEL, Roy.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620O.1-73620O.9Conference Paper

Packaging of MEMS MicrophonesFEIERTAG, Gregor; WINTER, Matthias; LEIDL, Anton et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620D.1-73620D.8Conference Paper

What happens turning a 250μm thin Piezo-stack sideways?: An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflectionZÄHRINGER, Sandy; SCHWESINGER, Norbert.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620L.1-73620L.8Conference Paper

Rapid prototyping and structure generation using three-dimensional nanolithography with electron beam induced chemical reactionsKOOPS, Hans W. P.SPIE proceedings series. 2003, pp 393-401, isbn 0-8194-4976-8, 9 p.Conference Paper

Novel measurement and monitoring system for forming processes based on piezoresistive thin film systemsBIEHL, Saskia; STAUFENBIEL, Sebastian; HAUSCHILD, Frank et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621J.1-73621J.5Conference Paper

High speed simultaneous optical and impedance analysis of single particlesMORGAN, Hywel; HOLMES, David; GREEN, Nicolas et al.SPIE proceedings series. 2005, pp 263-272, isbn 0-8194-5831-7, 1Vol, 10 p.Conference Paper

Actuator design using Electroactive PolymersFERNANDEZ, Diego; MORENO, Luis; BASELGA, Juan et al.SPIE proceedings series. 2005, pp 128-137, isbn 0-8194-5831-7, 1Vol, 10 p.Conference Paper

Smart tong grippers for micro-partsSCHLICK, Jochen; ZUEHLKE, Detlef.SPIE proceedings series. 2003, pp 220-228, isbn 0-8194-4976-8, 9 p.Conference Paper

Adsorption-Desorption Noise in Plasmonic Chemical/Biological Sensors in Multiple Analyte EnvironmentJAKSIC, Olga; JAKSIC, Zoran; MATOVIC, Jovan et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621F.1-73621F.12Conference Paper

Coupled piezoelectric-circuit FEA to study influence of a resistive load on power output of piezoelectric energy devicesMEILING ZHU; WORTHINGTON, Emma; NJUGUNA, James et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736202.1-736202.12Conference Paper

FIB generated antimony nanowires as chemical sensorsLUGSTEIN, A; AVDIC, A; BERTAGNOLLI, E et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620Q.1-73620Q.7Conference Paper

Design of infrared wavelength-selective microbolometers using planar multimode detectorsHAN, Sang-Wook; NEIKIRK, Dean P.SPIE proceedings series. 2005, pp 549-557, isbn 0-8194-5831-7, 1Vol, 9 p.Conference Paper

Advanced optical metrology aimed at part inspection and reverse engineering for Mems and NemsPFEIFER, Tilo; SCHMITT, Robert; ALERIANO, Ubaldo et al.SPIE proceedings series. 2005, pp 587-598, isbn 0-8194-5831-7, 1Vol, 12 p.Conference Paper

Overview of MEMS/NEMS Technology development for space applications at NASA/JPLGEORGE, Thomas.SPIE proceedings series. 2003, pp 136-148, isbn 0-8194-4976-8, 13 p.Conference Paper

Smart sensors development based on a distributed bus for microsystems applicationsFERRER, C; LORENTE, B.SPIE proceedings series. 2003, pp 74-83, isbn 0-8194-4976-8, 10 p.Conference Paper

An envelope model to describe the sensor dynamics of vibratory gyroscopesEGRETZBERGER, Markus; KUGI, Andreas.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620B.1-73620B.9Conference Paper

Increasing Sensitivity of Vibration Energy HarvesterHADAS, Z; ONDRUSEK, C; SINGULE, V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736203.1-736203.8Conference Paper

Smart sensors modeling using VHDL-AMS for micro instruments implementation with a distributed architectureLORENTE, B; BARRACHINA, L; FERRER, C et al.SPIE proceedings series. 2005, pp 86-97, isbn 0-8194-5831-7, 1Vol, 12 p.Conference Paper

Polymer-based MEMS accelerometer with modified organic electronics and thin film transistorVARADAN, Vijay K.SPIE proceedings series. 2003, pp 149-159, isbn 0-8194-4976-8, 11 p.Conference Paper

Smart electrostrictive composite materials for actuatorsYU, N; SOMPHONE, T.SPIE proceedings series. 2003, pp 252-259, isbn 0-8194-4976-8, 8 p.Conference Paper