Electrochemistry and microsystemsEHRFELD, Wolfgang.Electrochimica acta. 2003, Vol 48, Num 20-22, pp 2857-2868, issn 0013-4686, 12 p.Conference Paper

Progress and profit through micro technologies. Commercial applications of MEMS /MOEMSEHRFELD, Wolfgang; EHRFELD, Ursula.SPIE proceedings series. 2001, pp 1-10, isbn 0-8194-4285-2Conference Paper

Laser micromachined and laminated microfluidic components for miniaturized thermal, chemical and biological systemsMARTIN, P. M; MATSON, D. W; BENNETT, W. D et al.SPIE proceedings series. 1999, pp 826-833, isbn 0-8194-3154-0, 2VolConference Paper

Mass separation using thin PTFE membranesRUMMLER, Z; BACHER, W; SAILE, V et al.SPIE proceedings series. 1999, pp 1014-1021, isbn 0-8194-3154-0, 2VolConference Paper

Design of a pigtailed tunable filter for optical fiber transmissions at 1.3-1.55 μmGOUY, J. P; TIXIER, A; HASHIGUCHI, G et al.SPIE proceedings series. 1999, pp 207-213, isbn 0-8194-3154-0, 2VolConference Paper

Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equationsMRCARICA, Z; RISOJEVIC, V; LENCZNER, M et al.SPIE proceedings series. 1999, pp 306-315, isbn 0-8194-3154-0, 2VolConference Paper

Production of novel 3D microstructures using excimer laser mask projection techniquesRIZVI, N. H.SPIE proceedings series. 1999, pp 546-552, isbn 0-8194-3154-0, 2VolConference Paper

Electrostatically driven micromachined nickel resonators and gyroscopesRENKEN, O; BENECKE, W.SPIE proceedings series. 1999, pp 716-727, isbn 0-8194-3154-0, 2VolConference Paper

Laser diode wavelength locking using a micromachined silicon mirrorKAOU, N; CHAPPAZ, C; BASROUR, S et al.SPIE proceedings series. 1999, pp 765-772, isbn 0-8194-3154-0, 2VolConference Paper

MEMS resonator synthesis for testabilityDEB, N; IYER, S. V; MUKHERJEE, T et al.SPIE proceedings series. 1999, pp 58-69, isbn 0-8194-3154-0, 2VolConference Paper

Advanced 3D-CAD-interface for micro machining with excimer lasersTÖNSHOFF, H. K; VON ALVENSLEBEN, F; KULIK, C et al.SPIE proceedings series. 1999, pp 340-348, isbn 0-8194-3154-0, 2VolConference Paper

Hollow glass for insulating layersMERTICARU, A. R; MOAGAR-POLADIAN, V.SPIE proceedings series. 1999, pp 440-446, isbn 0-8194-3154-0, 2VolConference Paper

Coupling of length scales and atomistic simulation of MEMS resonatorsRUDD, R. E; BROUGHTON, J. Q.SPIE proceedings series. 1999, pp 104-113, isbn 0-8194-3154-0, 2VolConference Paper

CFD-ACE+MEMS : A CAD system for simulation and modeling of MEMSSTOUT, P; YANG, H. Q; DIONNE, P et al.SPIE proceedings series. 1999, pp 328-339, isbn 0-8194-3154-0, 2VolConference Paper

Multichannel arrays on polymer substrates: Towards a disposable proteomics chipBECKER, H; EHRFELD, W; POMMERSHEIM, R et al.SPIE proceedings series. 1999, pp 728-733, isbn 0-8194-3154-0, 2VolConference Paper

Rapid prototyping of silicon structures by aid of laser and abrasive-jet machiningKRUUSING, A; LEPPÄVUORI, S; UUSIMÄKI, A et al.SPIE proceedings series. 1999, pp 870-878, isbn 0-8194-3154-0, 2VolConference Paper

Reactive ion etching of quartz and glasses for microfabricationLEECH, P. W; REEVES, G. K.SPIE proceedings series. 1999, pp 839-847, isbn 0-8194-3154-0, 2VolConference Paper

Surface normal optical MEMS in dynamic WDM transport networksWALKER, J. A; FORD, J. E; GOOSSEN, K. W et al.SPIE proceedings series. 1999, pp 41-48, isbn 0-8194-3154-0, 2VolConference Paper

Thermal microactuator characterisationJONSMANN, J; BOUWSTRA, S.SPIE proceedings series. 1999, pp 1046-1055, isbn 0-8194-3154-0, 2VolConference Paper

Preliminary results on the use of mirror for LIGA processMEGTERT, S; PANTENBURG, F. J; ACHENBACH, S et al.SPIE proceedings series. 1999, pp 917-923, isbn 0-8194-3154-0, 2VolConference Paper

Fatigue test of thin film materials on a silicon chip using resonating loading systemANDO, T; YOSHIOKA, T; SHIKIDA, M et al.SPIE proceedings series. 1999, pp 977-983, isbn 0-8194-3154-0, 2VolConference Paper

'integration of SnO₂ sol-gel processes to gas sensor microfabrication : H₂ and CO sensitivity evaluationCOBIANU, C; IORGULESCU, R; SAVANIU, C et al.SPIE proceedings series. 1999, pp 1151-1158, isbn 0-8194-3154-0, 2VolConference Paper

Effect of polysilicon interface on stress in multi-stacked polysilicon filmsCHANG AUCK CHOI; CHANG SEUNG LEE; WON ICK JANG et al.SPIE proceedings series. 1999, pp 1134-1140, isbn 0-8194-3154-0, 2VolConference Paper

Modeling and optimization of micro coils for telemetric transmission at frequencies up to 20 MHzREHFUSS, S; MARSCHNER, C; KRIEGER, K.-L et al.SPIE proceedings series. 1999, pp 214-225, isbn 0-8194-3154-0, 2VolConference Paper

Micro moulding behaviour of engineering plasticsKEMMANN, O; SCHAUMBURG, C; WEBER, L et al.SPIE proceedings series. 1999, pp 464-471, isbn 0-8194-3154-0, 2VolConference Paper