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A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated DiaphragmFEIXIANG KE; JIANMIN MIAO; OBERHAMMER, Joachim et al.Journal of microelectromechanical systems. 2008, Vol 17, Num 6, pp 1447-1459, issn 1057-7157, 13 p.Article
