Stencil mask ion implantation technology : Special section on issues related to semiconductor manufacturing at technology nodes below 70 nmSHIBATA, Takeshi; SUGURO, Kyoichi; SUGIHARA, Kazuyoshi et al.IEEE transactions on semiconductor manufacturing. 2002, Vol 15, Num 2, pp 183-188, issn 0894-6507Article

Lithographyless ion implantation technology for agile fabNISHIHASHI, Tsutomu; KASHIMOTO, Kazuhiro; TSUNODA, Michio et al.IEEE transactions on semiconductor manufacturing. 2002, Vol 15, Num 4, pp 464-469, issn 0894-6507, 6 p.Conference Paper