Micromachined CMOS magnetic field sensor with ferromagnetic actuationLATORRE, L; BEROULLE, V; BERTRAND, Y et al.SPIE proceedings series. 2000, pp 398-405, isbn 0-8194-3645-3Conference Paper

Microactuated optical MEMSFUJITA, H.SPIE proceedings series. 2000, isbn 0-8194-3645-3, p. 2Conference Paper

Design, fabrication and packaging of closed chamber PCR-chips for DNA amplificationSCHABMUELLER, C. G. J; EVANS, A. G. R; BRUNNSCHWEILER, A et al.SPIE proceedings series. 2000, pp 362-369, isbn 0-8194-3645-3Conference Paper

A computational framework for modeling one-dimensional, sub-grid components and phenomena in multi-dimensional microsystemsPINDERA, M. Z; BAYYUK, S; UPADHYA, V et al.SPIE proceedings series. 2000, pp 272-279, isbn 0-8194-3645-3Conference Paper

Micromechanical silicon precision scaleOJA, A; SILLANPÄÄ, T; SEPPÄ, H et al.SPIE proceedings series. 2000, pp 498-505, isbn 0-8194-3645-3Conference Paper

MS reliability estimation featuresANDONOVA, A; ROUMENIN, C.SPIE proceedings series. 2000, pp 492-497, isbn 0-8194-3645-3Conference Paper

Non-linear analysis of beams under electrostatic loadsGUGLIOTTA, A; SOMA, A; DI MAURO, S et al.SPIE proceedings series. 2000, pp 90-98, isbn 0-8194-3645-3Conference Paper

Standardisation for microsystem technologyBRENNER, W; STELMACH, A; BARET, J et al.SPIE proceedings series. 2000, pp 218-225, isbn 0-8194-3645-3Conference Paper

Preliminary results on the use of mirror for LIGA processMEGTERT, S; PANTENBURG, F. J; ACHENBACH, S et al.SPIE proceedings series. 1999, pp 917-923, isbn 0-8194-3154-0, 2VolConference Paper

Fatigue test of thin film materials on a silicon chip using resonating loading systemANDO, T; YOSHIOKA, T; SHIKIDA, M et al.SPIE proceedings series. 1999, pp 977-983, isbn 0-8194-3154-0, 2VolConference Paper

'integration of SnO₂ sol-gel processes to gas sensor microfabrication : H₂ and CO sensitivity evaluationCOBIANU, C; IORGULESCU, R; SAVANIU, C et al.SPIE proceedings series. 1999, pp 1151-1158, isbn 0-8194-3154-0, 2VolConference Paper

Effect of polysilicon interface on stress in multi-stacked polysilicon filmsCHANG AUCK CHOI; CHANG SEUNG LEE; WON ICK JANG et al.SPIE proceedings series. 1999, pp 1134-1140, isbn 0-8194-3154-0, 2VolConference Paper

Modeling and optimization of micro coils for telemetric transmission at frequencies up to 20 MHzREHFUSS, S; MARSCHNER, C; KRIEGER, K.-L et al.SPIE proceedings series. 1999, pp 214-225, isbn 0-8194-3154-0, 2VolConference Paper

Micro moulding behaviour of engineering plasticsKEMMANN, O; SCHAUMBURG, C; WEBER, L et al.SPIE proceedings series. 1999, pp 464-471, isbn 0-8194-3154-0, 2VolConference Paper

Microfabrication techniques for thick structure of metals and PZTSHIMIZU, T; MURAKOSHI, Y; WANG, Z et al.SPIE proceedings series. 1999, pp 472-477, isbn 0-8194-3154-0, 2VolConference Paper

Examples of MEMS technologies resulting in industrial transfersDANEL, J.-S; BOREL, M; DELAYE, M.-T et al.SPIE proceedings series. 1999, pp 486-496, isbn 0-8194-3154-0, 2VolConference Paper

Polymeric optical MEMSHOSSFELD, J; PAATZSCH, T; SCHULZE, J et al.SPIE proceedings series. 1999, pp 637-645, isbn 0-8194-3154-0, 2VolConference Paper

Conventional micromachining for microassembly applicationsEBERHARDT, R; GEBHARDT, A; SCHELLER, T et al.SPIE proceedings series. 1999, pp 687-695, isbn 0-8194-3154-0, 2VolConference Paper

Infrastructure for Micro-System productionVAN HEEREN, H; SANCHEZ, S; ELDERS, J et al.SPIE proceedings series. 1999, pp 740-747, isbn 0-8194-3154-0, 2VolConference Paper

Optimization of cantilever probes for Atomic Force microscopyPEDERSEN, N. L.SPIE proceedings series. 1999, pp 131-140, isbn 0-8194-3154-0, 2VolConference Paper

A new pattern on fabrication of fiber spinnerets by the LIGA technologyTSENG, S. C; SHI, C. T; KUO, C. L et al.SPIE proceedings series. 1999, pp 518-525, isbn 0-8194-3154-0, 2VolConference Paper

Design, fabrication and thrust prediction of solid propellant microthrusters for space applicationROSSI, C; FABRE, N; CONEDERA, V et al.SPIE proceedings series. 1999, pp 906-916, isbn 0-8194-3154-0, 2VolConference Paper

A correct-by-construction approach to MEMS design and analysisDYNE, B; BERNSTEIN, D.SPIE proceedings series. 1999, pp 142-149, isbn 0-8194-3154-0, 2VolConference Paper

MOEMS at LETIMOTTIER, P; OLLIER, E; POUTEAU, P et al.SPIE proceedings series. 1999, pp 655-665, isbn 0-8194-3154-0, 2VolConference Paper

Silicon carbide-aluminium nitride : A new high stability composition for MEMSLUCHININ, V. V; KORLYAKOV, A. V; VASILEV, A. A et al.SPIE proceedings series. 1999, pp 783-791, isbn 0-8194-3154-0, 2VolConference Paper